Capacitive pressure sensor in comsol

One of the most important sensors in nanotechnology, MEMS design or control systems are the Capacitive pressure sensors. they depend on change of measured capacitance based on upper membrane position change due to gas pressure.

In this Comsol model a capacitive pressure sensor is built where there is an upper and lower membranes, as the pressure on the upper membrane increase its deflection increases so it become closer to the fixed lower membrane.

This deflection can be calculated very accurately for a very small scale (nanoscale) by measuring the change in the capacitance between the two membranes which of course depends on the separation distance.

This model is completely self-contained in which the geometry of model built and the physics and boundary conditions are set then simulation is made and final curve result showing the relation between pressure and capacitance is plotted.

This device can be a simulation for one of most important types of pressure sensors.

Contact me:

email: s-ahmed.saleh@zewailcity.edu.eg

List of all my codes: https://gumroad.com/ahmedsaleh

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Hire me directly on freelancer:

https://www.freelancer.com/u/AhmedSobhiSaleh

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COMSOL, MEMS, sensors, capacitive sensing, Gas pressure, Nanotechnology, MEMS simulation, sensors simulations,